US 12,215,966 B2
Methods and systems of optical inspection of electronic device manufacturing machines
Mohsin Waqar, Oakland, CA (US); Paul Zachary Wirth, Kalispell, MT (US); Todd James Brill, Denver, CO (US); Paul Edward Fisher, Los Altos, CA (US); Ilias Iliopoulos, Foster City, CA (US); and Charles Gregory Potter, Sr., Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 4, 2020, as Appl. No. 17/247,241.
Claims priority of provisional application 62/944,599, filed on Dec. 6, 2019.
Prior Publication US 2021/0172728 A1, Jun. 10, 2021
Int. Cl. G01B 11/14 (2006.01); G01B 11/02 (2006.01); G01B 11/06 (2006.01); G01B 11/24 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01)
CPC G01B 11/14 (2013.01) [G01B 11/026 (2013.01); G01B 11/0608 (2013.01); G01B 11/0683 (2013.01); G01B 11/24 (2013.01); H01L 21/67253 (2013.01); H01L 21/67288 (2013.01); H01L 21/67739 (2013.01); H01L 21/68735 (2013.01); H01L 22/12 (2013.01); B25J 11/0055 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An inspection device capable of being transferred by a robot blade into a processing chamber, the inspection device comprising:
one or more optical sensors, wherein each of the one or more optical sensors comprises a light source to generate sensing light and a light detector to detect light reflected from a plurality of locations of a target located within the processing chamber, and wherein the one or more optical sensors output, to a processing device, a plurality of time-mapped signals representative of a state of the plurality of locations of the target; and
a controller configured to:
map each of the plurality of time-mapped signals to a respective location of the plurality of locations of the target using a speed of the robot blade.