US 12,215,804 B2
Cooling of air actuated valve using actuating air
Adriana Vintila, Wilsonville, OR (US); and Matthew Scott Mudrow, Tigard, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/610,420
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed May 14, 2020, PCT No. PCT/US2020/032837
§ 371(c)(1), (2) Date Nov. 10, 2021,
PCT Pub. No. WO2020/236504, PCT Pub. Date Nov. 26, 2020.
Claims priority of provisional application 62/849,434, filed on May 17, 2019.
Prior Publication US 2022/0213979 A1, Jul. 7, 2022
Int. Cl. F16K 49/00 (2006.01); F16K 27/02 (2006.01); F16K 31/122 (2006.01); F16K 24/04 (2006.01)
CPC F16K 49/00 (2013.01) [F16K 27/02 (2013.01); F16K 31/1223 (2013.01); F16K 24/04 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A valve for fluid control in a plasma processing system, comprising:
an actuation housing of a valve body and surrounding an actuation cavity, the actuation housing including a first inlet port and a second inlet port each configured for entry of actuating air, and an exhaust port configured for exhausting the actuating air, wherein the valve body includes a top cap and a bottom cap and a wall, wherein each of the first inlet port and the second inlet port and the exhaust port is located on the wall; and
a poppet configured for linear movement within the valve body between the top cap and the bottom cap and including a barrier located within the actuation cavity, the poppet being actuated to an open position using the actuating air entering in the first inlet port, and the poppet being actuated to a closed position using the actuating air entering in the second inlet port;
wherein when the poppet is in the open position, the barrier is fully positioned between the second inlet port and the exhaust port in the actuation housing providing a first flow path for the actuating air to flow between the first inlet port and the exhaust port for cooling a stem of the poppet that is connected to opposing surfaces of the barrier that is configured to linearly move the stem using the actuating air,
wherein when the poppet is in the closed position, the barrier is fully positioned between the first inlet port and the exhaust port in the actuation housing providing a second flow path for the actuating air to flow between the second inlet port and the exhaust port for cooling the stem of the poppet,
a sealing housing of the valve body surrounding a sealing cavity, the valve body configured for controlling flow of a fluid, the sealing housing including a third inlet port configured for entry of the fluid into the sealing cavity of the sealing housing and an outlet port configured for exit of the fluid from the sealing cavity;
wherein a common wall of the actuation housing and the sealing housing separates the sealing cavity from the actuation cavity,
wherein the stem of the poppet is configured to connect a sealing plunger located within the sealing cavity to the barrier through a first opening in the common wall, and
an O-ring configured on an upper surface of the sealing plunger, wherein the O-ring is configured for sealing the first opening from the sealing cavity when the poppet is actuated to the open position.