CPC C30B 29/04 (2013.01) [C23C 16/27 (2013.01); C30B 25/14 (2013.01)] | 11 Claims |
1. A single-crystal diamond comprising:
n types of regions different in total concentration of an impurity observed in an observed surface being in parallel to a (110) face and having surface roughness Ra not greater than 5 μm, the observed surface being obtained by polishing a surface of the single-crystal diamond,
n being 2 or 3,
each of the n types of regions having an area not smaller than 0.1 μm2,
at least one of a first line, a second line, and a third line on the observed surface crossing a boundary between the n types of regions at least four times,
the first line, the second line, and the third line being line segments that are in parallel to a <−110> direction and have a length of 1 mm,
a midpoint of the first line corresponding to a center of gravity of the observed surface,
a midpoint of the second line corresponding to a point distant from the center of gravity by 300 μm in a <001> direction,
a midpoint of the third line corresponding to a point distant from the center of gravity by 300 μm in a <00−1> direction,
the n types of regions including a first type region and a second type region, the second type region being lower in the total concentration of the impurity than the first type region, and
a ratio of an area of the second type region to an area of the first type region being 1/20 or more.
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