	US 12,215,423 B2
	Gas manifold for simultaneous gas property control in deposition systems
David R. Beaulieu, Groton, MA (US); Jeffrey D. McHugh, Maynard, MA (US); Michael D. Trotter, Bolton, MA (US); and Darith Kong, Lowell, MA (US)
Assigned to Arradiance, LLC, Littleton, MA (US)
Filed by Arradiance, LLC, Littleton, MA (US)
Filed on Feb. 28, 2022, as Appl. No. 17/682,929.
Prior Publication US 2023/0272531 A1, Aug. 31, 2023
Int. Cl. C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/54 (2006.01)

CPC C23C 16/4557 (2013.01) [C23C 16/4412 (2013.01); C23C 16/45544 (2013.01); C23C 16/45565 (2013.01); C23C 16/45574 (2013.01); C23C 16/54 (2013.01)]

12 Claims

1. A gas manifold comprising:

a) a gas inlet surface comprising a first gas input port and a second gas input port;

b) a gas outlet surface;

c) a first internal chamber coupled to the first gas input port;

d) a first plurality of gas conduits, each of the first plurality of gas conduits having an input coupled to the first internal chamber and an outlet at the gas outlet surface, wherein a direction of at least one of the first plurality of gas conduits relative to the gas outlet surface is different from a direction of another one of the first plurality of gas conduits relative to the gas outlet surface, wherein a cross-sectional area of the at least one of the conduits in the first plurality of gas conduits is different from a cross-sectional area of another one of the conduits in the first plurality of gas conduits, and wherein a cross-sectional shape of the at least one of the first plurality of gas conduits is different from a cross-sectional shape of another one of the first plurality of gas conduits;

e) a second internal chamber coupled to the second gas input port, wherein the second internal chamber is isolated from the first internal chamber; and

f) a second plurality of gas conduits, each of the second plurality of gas conduits having an input coupled to the second internal chamber and an outlet at the gas outlet surface, wherein a direction of at least one of the second plurality of gas conduits relative to the gas outlet surface is different from a direction of another one of the second plurality of gas conduits relative to the gas outlet surface.