US 12,215,413 B2
Mask assembly and manufacturing method thereof
Fengli Ji, Beijing (CN); Jinsan Park, Beijing (CN); and Yidan Zhu, Beijing (CN)
Assigned to Chengdu BOE Optoelectronics Technology Co., Ltd., Sichuan (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/418,200
Filed by Chengdu BOE Optoelectronics Technology Co., Ltd., Chengdu (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed Dec. 29, 2020, PCT No. PCT/CN2020/140978
§ 371(c)(1), (2) Date Jun. 24, 2021,
PCT Pub. No. WO2021/136288, PCT Pub. Date Jul. 8, 2021.
Claims priority of application No. 202010006103.4 (CN), filed on Jan. 3, 2020.
Prior Publication US 2023/0138125 A1, May 4, 2023
Int. Cl. C23C 14/24 (2006.01); C23C 14/04 (2006.01)
CPC C23C 14/042 (2013.01) [C23C 14/24 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A mask assembly, comprising:
a metal frame, wherein the metal frame is provided with a first operation window penetrating through a thickness direction of the metal frame;
a metal plate, wherein the metal plate and the metal frame are stacked, the metal plate comprises a body and a plurality of connecting posts, the body of the metal plate is arranged in the first operation window and is provided with a plurality of second operation windows penetrating through a thickness direction of the body of the metal plate, the plurality of connecting posts are arranged at intervals along an outer periphery of the body of the metal plate, a part of the metal frame is provided with a plurality of grooves matched with the plurality of connecting posts, the plurality of grooves correspond to the plurality of connecting posts one by one and communicate with the first operation window, and the connecting posts are arranged in the grooves and are welded to the metal frame; and
at least one fine metal mask (FMM), wherein the at least one FMM is arranged on one side, away from the metal frame, of the metal plate; and the at least one FMM is provided with a plurality of openings penetrating through a thickness direction of the at least one FMM, and is welded to the metal frame;
wherein the at least one FMM is only welded to an area, arranged between two adjacent connecting posts, of the metal frame;
wherein the plurality of connecting posts do not support the at least one FMM;
wherein a depth of each of the grooves is H, a thickness of each of the connecting posts is h, and H and h satisfy a condition of H−h>10 μm.