US 12,215,024 B2
Adaptive MEMS device, codec for use with the MEMS device and method for providing diagnostic data, at run-time, on the current condition of a MEMS device
Darragh Francis Corrigan, Munich (DE); Andreas Wiesbauer, Poertschach (AT); and Guangzhao Zhang, Munich (DE)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Oct. 5, 2021, as Appl. No. 17/494,316.
Claims priority of application No. 20208975 (EP), filed on Nov. 20, 2020.
Prior Publication US 2022/0162061 A1, May 26, 2022
Int. Cl. B81C 1/00 (2006.01); B81B 7/00 (2006.01); H04R 1/04 (2006.01)
CPC B81C 1/00222 (2013.01) [B81B 7/007 (2013.01); B81B 7/008 (2013.01); H04R 1/04 (2013.01); B81B 2201/0257 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An adaptive microelectromechanical system (MEMS) device comprising:
a MEMS microphone; and
integrated circuitry, wherein the integrated circuitry is electrically connected to the MEMS microphone, and wherein the integrated circuitry is configured to:
read out a non-stimulated sensed output signal from the MEMS microphone;
provide the non-stimulated sensed output signal or a rendered version of the non-stimulated sensed output signal, via a first integrated interface, to an external processing device;
determine, at run-time, diagnostic data on a current condition of the MEMS device, by comparing the non-stimulated sensed output signal to a reference value or reference signal, thereby synergistically using the integrated circuitry to both read out the non-stimulated sensed output signal and determine the diagnostic data; and
provide, at run-time, the diagnostic data, via a second integrated interface, to the external processing device.