| CPC B81B 7/02 (2013.01) [H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2207/093 (2013.01); H04R 19/08 (2013.01); H04R 2201/003 (2013.01)] | 8 Claims |
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1. A microelectromechanical microphone, comprising:
a microphone unit made from a first substrate, the microphone unit comprising a movable element capable of being displaced under an effect of a pressure difference, and a sensor configured to measure the displacement of the movable element,
a cover made from a second substrate, said cover having a first recess, and
a first electrical connector connecting the sensor to a control circuit, wherein
the microphone unit and the cover are connected together to define (1) a measurement chamber having a controlled atmosphere at a pressure lower than atmospheric pressure and housing the sensor, and (2) a first cavity formed from the first recess,
the movable element partly closes said first cavity so that the first cavity is in fluid communication with the external environment,
the measurement chamber and the first cavity are insulated in a sealed manner from each other,
said microphone unit further includes at least one transmission member configured to mechanically transmit the displacement of the movable element to the sensor, and a sealed insulation element through which the at least one transmission member passes and ensuring sealed passage of the at least one transmission member between the external environment and the measurement chamber while maintaining the sealed insulation element, and
the measurement chamber and the first cavity are on a same side of a plane of the sealed insulation element.
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