| CPC B81B 7/008 (2013.01) [H03M 3/39 (2013.01)] | 10 Claims |

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6. A capacitive sensing method, applied to a circuit comprising a charge pump, a MEMS chip, an analog signal modulator, and a digital signal modulator, wherein the method comprises:
performing, by the analog signal modulator, analog signal modulation to an output signal of the MEMS chip and an output signal of the analog signal modulator, and
performing, by the digital signal modulator, digital signal modulation to the output signal of the analog signal modulator, and outputting a modulated signal by a digital interface.
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