US 12,215,020 B2
MEMS device with damping fluid vertically sandwiched between moving and non-moving structures
Stefan Richter, Jena (DE); Johannes Kindt, Weimar (DE); and Veljko Milanovic, Richmond, CA (US)
Assigned to MIRRORCLE TECHNOLOGIES, INC., Richmond, CA (US)
Filed by MIRRORCLE TECHNOLOGIES, INC., Richmond, CA (US)
Filed on Feb. 8, 2024, as Appl. No. 18/436,373.
Application 18/436,373 is a continuation of application No. 18/238,021, filed on Aug. 25, 2023.
Application 18/238,021 is a continuation of application No. 17/940,770, filed on Sep. 8, 2022, granted, now 11,772,959, issued on Oct. 3, 2023.
Application 17/940,770 is a continuation of application No. 16/632,511, granted, now 11,472,697, issued on Oct. 18, 2022, previously published as PCT/EP2018/068892, filed on Jul. 12, 2018.
Claims priority of provisional application 62/535,390, filed on Jul. 21, 2017.
Claims priority of application No. 10201707002.4 (DE), filed on Jul. 21, 2017.
Prior Publication US 2024/0174509 A1, May 30, 2024
Int. Cl. B81B 3/00 (2006.01); H02N 1/00 (2006.01)
CPC B81B 3/0078 (2013.01) [H02N 1/008 (2013.01); B81B 2201/04 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/058 (2013.01)] 26 Claims
OG exemplary drawing
 
1. A MEMS device, comprising:
a substrate;
a suspended element connected to a fixed part of the substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate;
a damping structure connected to the suspended element extending into a gap between the suspended element and the fixed part of the substrate wherein the damping structure includes one or more winglets that protrude over a recessed portion of the fixed part of the substrate; and
one or more fluid confinement structures formed by the recessed portion of the fixed substrate configured to permit movement of the damping structure over the recessed portion of the substrate and to confine a viscoelastic fluid to the limited portion of the gap underneath the one or more winglets.