US 12,215,017 B2
Vibration sensor
Alison Hake, Ann Arbor, MI (US); and Karl Grosh, Ann Arbor, MI (US)
Assigned to The Regents of the University of Michigan, Ann Arbor, MI (US)
Appl. No. 17/611,541
Filed by The Regents of the University of Michigan, Ann Arbor, MI (US)
PCT Filed May 14, 2020, PCT No. PCT/US2020/032914
§ 371(c)(1), (2) Date Nov. 15, 2021,
PCT Pub. No. WO2020/232259, PCT Pub. Date Nov. 19, 2020.
Claims priority of provisional application 62/848,430, filed on May 15, 2019.
Prior Publication US 2022/0212918 A1, Jul. 7, 2022
Int. Cl. B81B 3/00 (2006.01); H10N 30/20 (2023.01); H10N 30/87 (2023.01); H04R 17/10 (2006.01)
CPC B81B 3/0018 (2013.01) [H10N 30/204 (2023.02); H10N 30/872 (2023.02); B81B 2201/0285 (2013.01); H04R 17/10 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a frame;
a beam array comprising a plurality of beams, wherein each beam of the plurality of beams has an anchored end and an unanchored end, wherein each beam is coupled to the frame at the anchored end; and
a plurality of masses, wherein the unanchored end of each beam is coupled to a respective mass of the plurality of masses, wherein the beam array has a xylophonic shape, and wherein each mass has a mass thickness, and each mass thickness has a xylophonic variation that corresponds to the xylophonic shape of the beam array.