US 12,214,591 B2
Liquid discharge apparatus, liquid discharge method, molding apparatus, and article manufacturing method
Kosei Ito, Tochigi (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 22, 2022, as Appl. No. 17/871,822.
Claims priority of application No. 2021-125344 (JP), filed on Jul. 30, 2021.
Prior Publication US 2023/0035868 A1, Feb. 2, 2023
Int. Cl. B41J 2/045 (2006.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01)
CPC B41J 2/04573 (2013.01) [B41J 2/04586 (2013.01); B41J 2/1433 (2013.01); B41J 2/162 (2013.01); B41J 2/1637 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A liquid discharge apparatus comprising:
a substrate stage configured to move while holding a substrate;
a discharge unit including a nozzle for discharging a liquid;
a control unit configured to control the discharge unit to discharge the liquid from the discharge unit; and
a position acquisition unit configured to acquire a position of a movement target object at a predetermined timing while the substrate stage or the discharge unit is moved as the movement target object,
wherein the control unit controls a discharge timing for discharging the liquid from the discharge unit, based on an approximate expression relating to damping vibration of the movement target object obtained from a difference between the position of the movement target object acquired by the position acquisition unit at the predetermined timing and a target position of the movement target object at the predetermined timing.