| CPC B32B 41/00 (2013.01) [B32B 37/06 (2013.01); B32B 37/08 (2013.01); B32B 37/10 (2013.01); H01L 21/4846 (2013.01); B32B 2309/022 (2013.01); B32B 2309/105 (2013.01); B32B 2309/12 (2013.01); B32B 2309/72 (2013.01); B32B 2457/00 (2013.01)] | 19 Claims |
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1. A lamination tool comprising:
a press unit comprising:
a plurality of pressure sensors; and
a heating block, the heating block comprising a pressing surface and a plurality of heating and cooling elements positioned proximally to and distributed throughout the pressing surface, wherein the plurality of pressure sensors are embedded in the pressing surface, wherein each pressure sensor is paired with and adjacent to a corresponding one of the plurality of heating and cooling elements; and
a controller unit configured to regulate an output temperature of each of the plurality of heating and cooling elements, wherein each pressure sensor of the plurality of pressure sensors is coupled to the controller unit and configured to provide a corresponding pressure sensor feedback to the controller unit, wherein the output temperature for each of the corresponding ones of the plurality of heating and cooling elements is based on its corresponding pressure sensor feedback.
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