US 12,214,529 B2
Conveyance apparatus, planarization apparatus, and article manufacturing method
Takashi Hosaka, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jun. 1, 2022, as Appl. No. 17/829,630.
Claims priority of application No. 2021-109414 (JP), filed on Jun. 30, 2021.
Prior Publication US 2023/0001608 A1, Jan. 5, 2023
Int. Cl. B29C 43/58 (2006.01); B29C 43/18 (2006.01); B65G 43/08 (2006.01); B65G 47/248 (2006.01); G01B 11/06 (2006.01)
CPC B29C 43/58 (2013.01) [B29C 43/18 (2013.01); B65G 43/08 (2013.01); B65G 47/248 (2013.01); G01B 11/0675 (2013.01); B29C 2043/5825 (2013.01); B65G 2203/0225 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A conveyance apparatus that loads a pressing member to a planarization apparatus that forms a planarized film made of a material on a substrate by bringing a flat surface of the pressing member and the material on the substrate into contact with each other, the pressing member including a first surface including the flat surface, and a second surface on an opposite side of the first surface, the conveyance apparatus comprising:
a determiner configured to perform determination as to whether a determination surface of the pressing member is the first surface or the second surface; and
a controller configured to control the conveyance of the pressing member based on a result of the determination by the determiner,
wherein the determiner is configured to perform the determination in a state in which the pressing member is placed on a predetermined placement surface.