US 12,214,442 B2
Variable-pulse-width flat-top laser device and operating method therefor
Kyu Dong Sung, Seoul (KR); Jeen Hur, Anseong-si (KR); Eun Kyong Moon, Anyang-si (KR); and Hans Juergen Kahlert, Goettingen (DE)
Assigned to EO TECHNICS CO., LTD., Anyang-si (KR)
Filed by EO TECHNICS CO., LTD., Anyang-si (KR)
Filed on Jan. 26, 2024, as Appl. No. 18/424,662.
Application 18/424,662 is a continuation of application No. 17/799,268, previously published as PCT/KR2021/001525, filed on Feb. 5, 2021.
Claims priority of application No. 10-2020-0017149 (KR), filed on Feb. 12, 2020.
Prior Publication US 2024/0207973 A1, Jun. 27, 2024
Int. Cl. B23K 26/067 (2006.01); H01L 21/02 (2006.01)
CPC B23K 26/067 (2013.01) [H01L 21/02678 (2013.01); H01L 21/02686 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A laser device comprising:
a light source configured to emit a plurality of laser beams including a first to fourth laser beams; and
a homogenizer configured to receive the plurality of laser beams on an incident surface of the homogenizer and to form at least one processing beam based on the plurality of laser beams, the at least one processing beam being used for processing a target object,
wherein the homogenizer is further configured:
to have the incident surface including four quadrants arranged along two axes perpendicular to each other, with each quadrant receiving at least some of the plurality of laser beams, and
to shape the plurality of laser beams being emitted at different timings into at least one processing beam.