CPC B01D 61/08 (2013.01) [B01D 61/027 (2013.01); B01D 67/0062 (2013.01); B01D 67/0072 (2013.01); B01D 69/02 (2013.01); B01D 71/0213 (2022.08); C23C 16/24 (2013.01); C23C 16/50 (2013.01); C23C 16/56 (2013.01); G03F 7/30 (2013.01); H01M 10/54 (2013.01); B01D 2313/365 (2013.01); B01D 2323/28 (2013.01); B01D 2325/02833 (2022.08); B01D 2325/26 (2013.01)] | 19 Claims |
1. A membrane nanofiltration system for electrically conductive membrane separation comprising:
a conductive membrane filter comprising a silicon wafer, wherein the silicon wafer comprises a first region having pores with pore sizes ranging from 1 μm to 10 mm and a second region having pores with pore sizes ranging from 1 nm to 5 μm;
an electrical contact in contact with the membrane filter, wherein electrical current can flow from the electrical contact to the conductive membrane filter; and
a counter electrode above a top surface of the membrane electrode,
wherein the membrane filter, via the electrical contact, and the counter electrode are configured to:
generate an electric field between the membrane filter and the counter electrode;
hold the membrane filter at a constant electric potential; or
flow constant current into the membrane filter, and
wherein the membrane filter is configured to separate a component from a mixture solution, and
wherein the pore size of the pores in the first region are different from the pore size of the pores in the second region, and
wherein the silicon wafer is monolithic silicon and is not bound to a support.
|