US 11,889,766 B2
Miniature fluid actuator
Hao-Jan Mou, Hsinchu (TW); Hsien-Chung Tai, Hsinchu (TW); Lin-Huei Fang, Hsinchu (TW); Yung-Lung Han, Hsinchu (TW); Chi-Feng Huang, Hsinchu (TW); Chun-Yi Kuo, Hsinchu (TW); and Tsung-I Lin, Hsinchu (TW)
Assigned to Microjet Technology Co., Ltd., Hsinchu (TW)
Filed by Microjet Technology Co., Ltd., Hsinchu (TW)
Filed on Oct. 16, 2020, as Appl. No. 17/072,642.
Claims priority of application No. 108141845 (TW), filed on Nov. 18, 2019.
Prior Publication US 2021/0151663 A1, May 20, 2021
Int. Cl. H01L 41/09 (2006.01); H10N 30/20 (2023.01)
CPC H10N 30/2047 (2023.02) 12 Claims
OG exemplary drawing
 
1. A miniature fluid actuator comprising:
a substrate having at least one inlet;
a chamber layer formed on the substrate and comprising:
a first chamber connected to the at least one inlet;
a resonance layer having a central aperture, wherein the central aperture is in communication with the first chamber; and
a second chamber spatially corresponding to the first chamber and in communication with the first chamber through the central aperture;
a carrying layer formed on the chamber layer and comprising:
a fixed region formed on the chamber layer;
a vibration region located at a center of the fixed region and spatially corresponding to the second chamber;
at least one connection portion connected between the fixed region and the vibration region; and
at least one vacant formed among the fixed region, the vibration region and the at least one connection portion; and
a piezoelectric assembly formed on the vibration region;
wherein the second chamber is arranged between the carrying layer and the resonance layer.