US 11,889,764 B2
Piezoelectric actuator
Hao-Jan Mou, Hsinchu (TW); Shih-Chang Chen, Hsinchu (TW); Jia-Yu Liao, Hsinchu (TW); Hung-Hsin Liao, Hsinchu (TW); Che-Wei Huang, Hsinchu (TW); Chi-Feng Huang, Hsinchu (TW); Yung-Lung Han, Hsinchu (TW); Chun-Yi Kuo, Hsinchu (TW); and Wei-Ming Lee, Hsinchu (TW)
Assigned to Microjet Technology Co., Ltd., Hsinchu (TW)
Filed by Microjet Technology Co., Ltd., Hsinchu (TW)
Filed on Jun. 16, 2021, as Appl. No. 17/349,249.
Claims priority of application No. 109122143 (TW), filed on Jun. 30, 2020.
Prior Publication US 2021/0408362 A1, Dec. 30, 2021
Int. Cl. H01L 41/053 (2006.01); H10N 30/20 (2023.01); H10N 30/88 (2023.01)
CPC H10N 30/20 (2023.02) [H10N 30/88 (2023.02)] 5 Claims
OG exemplary drawing
 
1. A piezoelectric actuator, comprising:
a suspension plate having a square shape and with a central portion and a periphery portion, wherein the suspension plate is permitted to undergo a curvy vibration from the central portion to the periphery portion, wherein the length of the suspension plate is in a range between 9 mm and 10 mm, and the thickness of the suspension plate is 0.27 mm;
an outer frame arranged around the suspension plate;
a plurality of brackets, wherein each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate, and each bracket has a length of 1.30 mm, and a width in a range of 0.45 mm; and
a piezoelectric ceramic plate having a square shape, wherein a length of a side of the piezoelectric ceramic plate is equal to or less than a length of a side of the suspension plate, and the piezoelectric ceramic plate is attached on a first surface of the suspension plate to drive the suspension plate to undergo the curvy vibration when a voltage is applied to the piezoelectric ceramic plate.