US 11,889,742 B2
Apparatus of manufacturing display device and method of manufacturing display device
Seungkuk Lee, Asan-si (KR); and Beomjun Cheon, Asan-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Sep. 30, 2021, as Appl. No. 17/449,559.
Claims priority of application No. 10-2020-0145780 (KR), filed on Nov. 4, 2020; and application No. 10-2021-0016874 (KR), filed on Feb. 5, 2021.
Prior Publication US 2022/0140295 A1, May 5, 2022
Int. Cl. H10K 71/00 (2023.01); H10K 71/80 (2023.01); H01L 21/67 (2006.01)
CPC H10K 71/00 (2023.02) [H01L 21/67011 (2013.01); H01L 21/67132 (2013.01); H10K 71/80 (2023.02); H10K 71/851 (2023.02); Y10T 156/11 (2015.01); Y10T 156/1174 (2015.01); Y10T 156/1179 (2015.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for manufacturing a display device, comprising:
a first stage comprising a plurality of cell units defined by dividing a mother substrate and a work protective film attached on the mother substrate, each of the cell units comprising:
a display unit comprising a display area, and a pad area; and
a protective film unit attached to the display unit, and comprising a display film portion corresponding to the display area, and a pad film portion corresponding to the pad area;
a second stage where the pad film portion of the cell units is peeled off; and
a transfer unit configured to transfer the cell units to the second stage from the first stage, and to peel off the pad film portion, the transfer unit comprising:
a body member comprising a first surface and a second surface opposite to the first surface;
a plurality of pins along a first direction on the first surface of the body member;
a plurality of suction pads on the first surface of the body member along a second direction crossing the first direction; and
a reel member on the second surface of the body member, and configured to supply a peeling tape.