US 11,889,595 B2
Vacuum pump and heating device therefor
Yoshinobu Ohtachi, Yachiyo (JP); Yasushi Maejima, Yachiyo (JP); and Tsutomu Takaada, Yachiyo (JP)
Assigned to Edwards Japan Limited, Yachiyo (JP)
Appl. No. 16/616,293
Filed by Edwards Japan Limited, Yachiyo (JP)
PCT Filed May 23, 2018, PCT No. PCT/JP2018/019824
§ 371(c)(1), (2) Date Nov. 22, 2019,
PCT Pub. No. WO2018/221345, PCT Pub. Date Dec. 6, 2018.
Claims priority of application No. 2017-106108 (JP), filed on May 30, 2017.
Prior Publication US 2020/0092952 A1, Mar. 19, 2020
Int. Cl. F04D 29/58 (2006.01); H05B 1/02 (2006.01); F04D 19/04 (2006.01); F16K 49/00 (2006.01); F16L 53/37 (2018.01); F16L 53/38 (2018.01)
CPC H05B 1/0244 (2013.01) [F04D 19/042 (2013.01); F04D 29/58 (2013.01); F04D 29/584 (2013.01); F04D 19/04 (2013.01); F16K 49/002 (2013.01); F16L 53/37 (2018.01); F16L 53/38 (2018.01)] 9 Claims
OG exemplary drawing
 
1. A vacuum pump that exhausts gas by rotation of a rotating body, the vacuum pump comprising:
an exhaust flow path for exhausting the gas; and
a heating means for heating the exhaust flow path, wherein:
the heating means includes a plurality of resistance heating elements connected in parallel to a pair of wiring lines, wherein each respective resistance heating element of the plurality of resistance heating elements connects to the pair of wiring lines,
the plurality of resistance heating elements are arranged at intervals around the rotating body,
each respective resistance heating element of the plurality of resistance heating elements have respective connectors, configured to be attached and detached,
the pair of wiring lines and the respective resistance heating element is coupled by the respective connectors, and
a control means configured to:
control an operation of the vacuum pump, and
determine that heater maintenance is not necessary and continue the operation of the vacuum pump when a number of respective resistance heating element failures is smaller than a predetermined reference failure number.