US 11,889,264 B2
Fiber optic MEMS microphone
Baris Bayram, Ankara (TR); Asaf Behzat Sahin, Ankara (TR); Ilker Oguz, Ankara (TR); Goktug Cihan Ozmen, Ankara (TR); Ekin Muharrem Karaca, Ankara (TR); and Doga Buse Cavdir, Ankara (TR)
Assigned to ORTA DOGU TEKNIK UNIVERSITESI, Ankara (TR)
Appl. No. 17/604,441
Filed by ORTA DOGU TEKNIK UNIVERSITESI, Ankara (TR)
PCT Filed Apr. 18, 2019, PCT No. PCT/TR2019/050262
§ 371(c)(1), (2) Date Oct. 18, 2021,
PCT Pub. No. WO2020/214108, PCT Pub. Date Oct. 22, 2020.
Prior Publication US 2022/0182770 A1, Jun. 9, 2022
Int. Cl. H04R 23/00 (2006.01)
CPC H04R 23/008 (2013.01) [H04R 2201/003 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A fiber optic MEMS microphone, comprising:
a MEMS device integrated at an end of an optical fiber cable,
a photodiode chip placed on a top of the MEMS device,
a voltage generated by the photodiode chip, wherein the photodiode chip is electrically wired to SIGNAL and GND pads of the MEMS device,
wherein the MEMS device reflects a part of an incident laser light from a membrane back to the optical fiber cable, and allows a remaining part of the incident laser light to transmit through the membrane onto the photodiode chip,
the membrane is coated with an optically reflective material for reflecting the incident laser light,
the membrane has air holes for transmitting the incident laser light,
a power adjustable laser beam by a laser diode, wherein the laser diode is biasing the MEMS device at different voltage values,
wherein a light is used for a detection of a membrane displacement via a phase modulation or an intensity modulation of the incident laser light, and
the light is also used in an energy transmission through the optical fiber cable for a generation of the voltage across the photodiode chip.