US 11,888,464 B2
Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
Seiichiro Ogura, Minowa (JP); Keiichi Yamaguchi, Ina (JP); Masahiro Oshio, Shiojiri (JP); and Takashi Yamazaki, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Dec. 14, 2022, as Appl. No. 18/081,084.
Application 18/081,084 is a continuation of application No. 17/243,632, filed on Apr. 29, 2021, granted, now 11,595,026.
Application 17/243,632 is a continuation of application No. 16/253,712, filed on Jan. 22, 2019, granted, now 11,025,222.
Claims priority of application No. 2018-009173 (JP), filed on Jan. 23, 2018.
Prior Publication US 2023/0109944 A1, Apr. 13, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/21 (2006.01); H03H 3/02 (2006.01); H03H 9/05 (2006.01); G01C 19/5607 (2012.01); H03H 3/04 (2006.01); H03H 9/10 (2006.01); G01C 19/5621 (2012.01); G01C 19/5628 (2012.01); G01C 19/5663 (2012.01); G01C 19/5656 (2012.01)
CPC H03H 9/21 (2013.01) [G01C 19/5607 (2013.01); G01C 19/5621 (2013.01); G01C 19/5628 (2013.01); G01C 19/5656 (2013.01); G01C 19/5663 (2013.01); H03H 3/02 (2013.01); H03H 3/04 (2013.01); H03H 9/0533 (2013.01); H03H 9/0547 (2013.01); H03H 9/0595 (2013.01); H03H 9/1014 (2013.01); H03H 2003/026 (2013.01); H03H 2003/0492 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A vibration element comprising:
three axes orthogonal to each other being defined as an X-axis, a Y-axis, and a Z-axis;
a base; and
a vibrating arm extending from the base to a positive side of the Y-axis, wherein the vibrating arm is configured with:
a weight;
an arm positioned between the base and the weight; and
a weight film disposed on the weight, the weight includes a first principal surface and a second principal surface that are perpendicular to the Z-axis and have a front and back relationship with each other,
wherein a plane passing through a center of the arm in a Z-axis direction along the Z-axis and parallel to an X-Y plane containing the X-axis and the Y-axis is defined as a center plane,
a center of gravity of the weight is on a first principal surface side with respect to the center plane, and
a center of gravity of the weight film is on a second principal surface side with respect to the center surface,
wherein the weight includes a first portion and a second portion, and the second portion is thinner than the first portion in the Z-axis direction,
wherein the second principal surface has a stepped shape formed by the first portion and the second portion, and
the second portion is arranged in a region from an end of the first portion on the positive side of the Y axis to an end of the weight on the positive side of the Y axis in a plan view from the Z-axis direction.