CPC H03H 9/21 (2013.01) [G01C 19/5607 (2013.01); G01C 19/5621 (2013.01); G01C 19/5628 (2013.01); G01C 19/5656 (2013.01); G01C 19/5663 (2013.01); H03H 3/02 (2013.01); H03H 3/04 (2013.01); H03H 9/0533 (2013.01); H03H 9/0547 (2013.01); H03H 9/0595 (2013.01); H03H 9/1014 (2013.01); H03H 2003/026 (2013.01); H03H 2003/0492 (2013.01)] | 14 Claims |
1. A vibration element comprising:
three axes orthogonal to each other being defined as an X-axis, a Y-axis, and a Z-axis;
a base; and
a vibrating arm extending from the base to a positive side of the Y-axis, wherein the vibrating arm is configured with:
a weight;
an arm positioned between the base and the weight; and
a weight film disposed on the weight, the weight includes a first principal surface and a second principal surface that are perpendicular to the Z-axis and have a front and back relationship with each other,
wherein a plane passing through a center of the arm in a Z-axis direction along the Z-axis and parallel to an X-Y plane containing the X-axis and the Y-axis is defined as a center plane,
a center of gravity of the weight is on a first principal surface side with respect to the center plane, and
a center of gravity of the weight film is on a second principal surface side with respect to the center surface,
wherein the weight includes a first portion and a second portion, and the second portion is thinner than the first portion in the Z-axis direction,
wherein the second principal surface has a stepped shape formed by the first portion and the second portion, and
the second portion is arranged in a region from an end of the first portion on the positive side of the Y axis to an end of the weight on the positive side of the Y axis in a plan view from the Z-axis direction.
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