US 11,888,463 B2
Multi-port filter using transversely-excited film bulk acoustic resonators
Andrew Guyette, Santa Barbara, CA (US); Neal Fenzi, Santa Barbara, CA (US); and Patrick Turner, San Bruno, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by MURATA MANUFACTURING CO., LTD, Kyoto (JP)
Filed on Nov. 10, 2020, as Appl. No. 17/094,569.
Application 17/094,569 is a continuation in part of application No. 16/988,213, filed on Aug. 7, 2020, granted, now 11,201,601.
Application 16/988,213 is a continuation in part of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 63/040,435, filed on Jun. 17, 2020.
Claims priority of provisional application 62/904,152, filed on Sep. 23, 2019.
Claims priority of provisional application 62/892,980, filed on Aug. 28, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2021/0067133 A1, Mar. 4, 2021
Int. Cl. H03H 9/13 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/132 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/02228 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A filter device, comprising:
a substrate having a surface;
a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate, portions of the single-crystal piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate; and
a conductor pattern formed on the front surface, the conductor pattern defining a low band filter including one or more low band shunt resonators and one or more low band series resonators and a high band filter including one or more high band shunt resonators and one or more high band series resonators, wherein
interleaved fingers of interdigital transducers (IDTs) of the one or more low band shunt resonators are disposed on respective diaphragms having a first thickness ts1,
interleaved fingers of IDTs of the one or more high band series resonators are disposed on respective diaphragms having a second thickness ts2 less than ts1, and
interleaved fingers of IDTs of the one or more low band series resonators and the one or more high band shunt resonators are disposed on respective diaphragms having other thicknesses intermediate ts1 and ts2.