US 11,888,460 B2
Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
Neal Fenzi, Santa Barbara, CA (US); Robert Hammond, Santa Barbara, CA (US); Patrick Turner, San Bruno, CA (US); Bryant Garcia, Mississauga (CA); and Ryo Wakabayashi, Santa Clara, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Aug. 30, 2022, as Appl. No. 17/899,354.
Application 17/899,354 is a continuation of application No. 17/131,414, filed on Dec. 22, 2020, granted, now 11,482,981.
Claims priority of provisional application 63/050,014, filed on Jul. 9, 2020.
Prior Publication US 2023/0006632 A1, Jan. 5, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
a single-crystal piezoelectric plate attached directly or by one or more intermediate layers to the substrate and having a portion that spans a cavity; and
an interdigital transducer (IDT) at a surface of the piezoelectric plate and having interleaved fingers at the portion of the piezoelectric plate that spans the cavity,
wherein the substrate and the piezoelectric plate include a same material, and
wherein the piezoelectric plate and interleaved fingers are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the portion of the piezoelectric plate.