CPC H03H 9/02228 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01)] | 20 Claims |
1. An acoustic resonator device comprising:
a substrate;
a single-crystal piezoelectric plate attached directly or by one or more intermediate layers to the substrate and having a portion that spans a cavity; and
an interdigital transducer (IDT) at a surface of the piezoelectric plate and having interleaved fingers at the portion of the piezoelectric plate that spans the cavity,
wherein the substrate and the piezoelectric plate include a same material, and
wherein the piezoelectric plate and interleaved fingers are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the portion of the piezoelectric plate.
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