US 11,888,412 B2
Stackable actuating element with profiled insulated electrode structures
Ville Topias Makinen, Espoo (FI); and Roberto Tejera-Garcia, Espoo (FI)
Assigned to PixArt Imaging Inc., Hsin-Chu (TW)
Filed by PixArt Imaging Inc., Hsin-Chu (TW)
Filed on Jul. 16, 2021, as Appl. No. 17/377,403.
Application 17/377,403 is a continuation in part of application No. 15/852,386, filed on Dec. 22, 2017, granted, now 11,101,745.
Claims priority of application No. 20175691 (FI), filed on Jul. 14, 2017.
Prior Publication US 2021/0344284 A1, Nov. 4, 2021
Int. Cl. H02N 1/00 (2006.01)
CPC H02N 1/006 (2013.01) 6 Claims
OG exemplary drawing
 
1. An active element (AE) layer comprising:
a substrate comprising an active body area and a protruding arm;
an electrode, formed on the substrate and comprising an active region for sensing or actuation formed on the active body area of the substrate and a connection region formed on the protruding arm of the substrate, wherein the electrode comprises a first indented line around the periphery of the active region, extending into the connection region and reaching two respective edges of the connection region, wherein the first indented line totally penetrates the electrode to make the respective edges electrically isolated; and
an insulator layer formed on the electrode covering the active region and partially covering the connection region, wherein the insulator layer fills the indented line of the electrode.