US 11,888,086 B2
Apparatus and method for manufacturing display device
Jin Woo Choi, Yongin-si (KR); Min Woo Kim, Yongin-si (KR); Sung Kook Park, Yongin-si (KR); Dae Ho Song, Yongin-si (KR); So Yeon Yoon, Yongin-si (KR); and Joo Woan Cho, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Dec. 16, 2021, as Appl. No. 17/553,653.
Claims priority of application No. 10-2021-0056925 (KR), filed on Apr. 30, 2021.
Prior Publication US 2022/0352411 A1, Nov. 3, 2022
Int. Cl. H01L 33/00 (2010.01); H01L 25/075 (2006.01)
CPC H01L 33/0095 (2013.01) [H01L 25/0753 (2013.01); H01L 33/0093 (2020.05); H01L 2933/0016 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A manufacturing apparatus of a display device, comprising:
a first unit configured to transfer a plurality of light emitting elements on a growth substrate to a first film to be spaced from one another by a first distance;
a second unit configured to expand the first film to space each of the plurality of light emitting elements on the first film from adjacent light emitting elements by a second distance greater than the first distance;
a third unit configured to retransfer the plurality of light emitting elements to a second film;
a fourth unit configured to determine positions of the plurality of light emitting elements by irradiating a guide laser beam to the plurality of light emitting elements on the second film;
a fifth unit configured to bin the light emitting elements on the second film, and determine an effective light source from among the light emitting elements;
a sixth unit configured to form a plurality of pixels on a substrate, each pixel comprising one or more transistors, a first electrode electrically connected to a transistor from among the one or more transistors, and a first bonding electrode on the first electrode;
a seventh unit configured to remove the second film after transferring one light emitting element to the first bonding electrode of one pixel by irradiating a laser beam using a laser shot; and
an eighth unit configured to form a second electrode on the one light emitting element.