CPC H01L 28/60 (2013.01) [H10B 53/30 (2023.02); H10B 53/40 (2023.02)] | 28 Claims |
1. A ferroelectric device comprising a ferroelectric insulative material consisting of one or members of the group consisting of a non-iron, non-hafnium transition metal oxide, zirconium, zirconium oxide, niobium, and niobium oxide, and one or more members of the group consisting of ZnSiO, ZnO and ZnSi, wherein the zinc is present at a concentration of less than or equal to 15 at %.
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