US 11,888,000 B2
Geiger-mode focal plane array with monolithically integrated resistors
Mark Allen Itzler, Princeton, NJ (US); Brian Piccione, Yardley, PA (US); Xudong Jiang, Princeton, NJ (US); and Krystyna Slomkowski, Parlin, NJ (US)
Assigned to LG INNOTEK CO., LTD., Seoul (KR)
Filed by LG INNOTEK CO., LTD., Seoul (KR)
Filed on Sep. 9, 2021, as Appl. No. 17/470,178.
Application 17/470,178 is a division of application No. 16/002,816, filed on Jun. 7, 2018, granted, now 11,233,076.
Claims priority of provisional application 62/516,453, filed on Jun. 7, 2017.
Prior Publication US 2021/0408089 A1, Dec. 30, 2021
Int. Cl. H01L 27/144 (2006.01); H01L 31/107 (2006.01); H01L 27/146 (2006.01); H01L 31/02 (2006.01); G01J 1/44 (2006.01); H01C 7/00 (2006.01)
CPC H01L 27/1446 (2013.01) [G01J 1/44 (2013.01); H01L 31/02027 (2013.01); H01L 31/107 (2013.01); G01J 2001/448 (2013.01); G01J 2001/4466 (2013.01); H01C 7/006 (2013.01); H01L 27/14609 (2013.01)] 18 Claims
OG exemplary drawing
 
11. A method of controlling a Geiger-mode avalanche photodiode (GmAPD) focal plane array (FPA), the method comprising:
monolithically integrating, into each pixel of the GmAPD FPA, a limit resistor,
wherein the limit resistor is electrically coupled in series to an electrical contact of the GmAPD and to an active quenching circuit within a unit cell of a read out integrated circuit (ROIC unit cell).