CPC H01L 27/1446 (2013.01) [G01J 1/44 (2013.01); H01L 31/02027 (2013.01); H01L 31/107 (2013.01); G01J 2001/448 (2013.01); G01J 2001/4466 (2013.01); H01C 7/006 (2013.01); H01L 27/14609 (2013.01)] | 18 Claims |
11. A method of controlling a Geiger-mode avalanche photodiode (GmAPD) focal plane array (FPA), the method comprising:
monolithically integrating, into each pixel of the GmAPD FPA, a limit resistor,
wherein the limit resistor is electrically coupled in series to an electrical contact of the GmAPD and to an active quenching circuit within a unit cell of a read out integrated circuit (ROIC unit cell).
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