US 11,887,900 B2
Semiconductor package including test pad
Hyuek Jae Lee, Hwaseong-si (KR); Tae Hun Kim, Asan-si (KR); Ji Hwan Hwang, Hwaseong-si (KR); Ji Hoon Kim, Asan-si (KR); and Ji Seok Hong, Yongin-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jul. 6, 2021, as Appl. No. 17/367,903.
Application 17/367,903 is a continuation of application No. 16/508,498, filed on Jul. 11, 2019, granted, now 11,088,038.
Claims priority of application No. 10-2018-0129137 (KR), filed on Oct. 26, 2018.
Prior Publication US 2021/0335680 A1, Oct. 28, 2021
Int. Cl. H01L 23/528 (2006.01); H01L 21/66 (2006.01); H01L 23/00 (2006.01)
CPC H01L 22/32 (2013.01) [H01L 23/5283 (2013.01); H01L 24/09 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A semiconductor package comprising:
a base including a base bonding structure and on a lower structure;
a connection structure between the lower structure and the base;
a first semiconductor chip on a first region of the base; and
a second semiconductor chip on a second region of the base and spaced apart from the first semiconductor chip in a first direction that is parallel to an upper surface of the lower structure,
wherein the base bonding structure of the base includes a base insulating layer, a first base pad, a base test pad and a second base pad,
wherein the first semiconductor chip includes a first semiconductor substrate, a first bonding structure, and a first internal circuit structure between the first semiconductor substrate and the first bonding structure,
wherein the first bonding structure includes a first insulating layer bonded to the base insulating layer, and a first front side pad bonded to the first base pad along planar surfaces of the first front side pad and the first base pad that face each other,
wherein the second semiconductor chip includes a second semiconductor substrate, a second bonding structure, and a second internal circuit structure between the second semiconductor substrate and the second bonding structure,
wherein the second bonding structure includes a second insulating layer bonded to the base insulating layer and a second front side pad bonded to the second base pad along planar surfaces of the second front side pad and the second base pad that face each other, and
wherein the base test pad does not overlap the second semiconductor chip in a vertical direction that is perpendicular to the upper surface of the lower structure,
wherein the base test pad does not overlap the first front side pad of the first semiconductor chip and overlaps a lower surface of the first insulating layer of the first semiconductor chip in the vertical direction, and
wherein the lower surface of the first insulating layer and a lower surface of the first front side pad are coplanar with each other, and
wherein a center of an upper surface of the base test pad contacts the lower surface of the first insulating layer.