CPC H01L 21/68735 (2013.01) [C23C 16/513 (2013.01); G03F 7/707 (2013.01); G03F 7/70783 (2013.01); H01L 21/68757 (2013.01)] | 20 Claims |
1. A method comprising:
supporting a table base, wherein the table base comprises a surface that is substantially flat; and
disposing a coating on the surface with a non-uniform thickness,
wherein the coating exerts a stress on the table base so as to bend the table base, and
wherein the non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
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