US 11,887,879 B2
In-situ apparatus for semiconductor process module
Yogananda Sarode Vishwanath, Bangalore (IN); Steven E. Babayan, Los Altos, CA (US); Stephen Prouty, San Jose, CA (US); and Andreas Schmid, Meyriez (CH)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 1, 2021, as Appl. No. 17/365,612.
Application 17/365,612 is a continuation of application No. 16/103,531, filed on Aug. 14, 2018, granted, now 11,075,105.
Claims priority of provisional application 62/561,463, filed on Sep. 21, 2017.
Prior Publication US 2021/0351063 A1, Nov. 11, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68707 (2013.01) [C23C 16/4584 (2013.01); C23C 16/4585 (2013.01); H01J 37/32623 (2013.01); H01L 21/67748 (2013.01); H01L 21/6831 (2013.01); H01L 21/68721 (2013.01); H01L 21/68742 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A carrier for supporting an edge ring, comprising:
a plate having a perimeter including a plurality of curved edges and a plurality of parallel edges;
a plurality of inserts disposed in the plate, each insert formed of a polymer material and configured to engage a supporting structure; and
a plurality of support structures coupled to the plurality of curved edges, each respective support structure extending above a plane of an upper surface of the plate, and each respective support structure comprising:
a step formed on a radially outward edge of the respective support structure and disposed above and below the plane of the upper surface of the plate, the step of each respective support structure comprising:
a supporting surface disposed parallel to and below the upper surface of the plate, and
an arcuate wall positioned radially inward of the supporting surface of the respective support structure and oriented perpendicular to and extending above the plane of the upper surface of the plate, the arcuate wall of each respective support structure extending perpendicularly to the supporting surface of the respective support structure, and
a male extension positioned radially inward of the wall and extending into the plate.