CPC H01L 21/67051 (2013.01) [B08B 3/022 (2013.01); B08B 3/10 (2013.01); B08B 13/00 (2013.01); B08B 2203/007 (2013.01); B08B 2203/027 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01)] | 11 Claims |
1. A liquid supply unit for supplying a liquid comprising:
a tank having an inner space for storing the liquid;
an inlet line for supplying the liquid from a liquid supply source to the inner space and having an inlet valve installed thereon;
an outlet line for supplying the liquid from the tank to a nozzle or for recollecting the liquid to the tank and having an outlet valve installed thereon;
a gas supply line for supplying a gas to the inner space and having a gas control valve installed thereon;
an exhaust line for exhausting the inner space and having an exhaust valve installed thereon;
a circulation line for circulating the liquid stored in the inner space; and
a controller configured to control the liquid supply unit so that the circulation line is pressurized while the liquid is supplied to the inner space.
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