US 11,887,867 B2
Vacuum arrangement and method
Torsten Dsaak, Dresden (DE); Thomas Meyer, Dresden (DE); Bernd Teichert, Dresden (DE); and Ralf Biedermann, Dresden (DE)
Assigned to VON ARDENNE ASSET GMBH & CO. KG, Dresden (DE)
Filed by VON ARDENNE Asset GmbH & Co. KG, Dresden (DE)
Filed on Jun. 26, 2019, as Appl. No. 16/452,560.
Claims priority of application No. 10 2018 115 410.0 (DE), filed on Jun. 27, 2018.
Prior Publication US 2020/0006091 A1, Jan. 2, 2020
Int. Cl. H01L 21/67 (2006.01); C23C 14/56 (2006.01); F26B 5/06 (2006.01); F26B 5/04 (2006.01)
CPC H01L 21/67034 (2013.01) [C23C 14/566 (2013.01); F26B 5/042 (2013.01); F26B 5/06 (2013.01)] 18 Claims
OG exemplary drawing
 
1. Vacuum arrangement, comprising:
a first dehydration chamber and a second dehydration chamber, which are gas-separated from one another;
a substrate transfer chamber configured to change clocked substrate transport into continuous substrate transport towards the second dehydration chamber, wherein the substrate transfer chamber configured to change clocked substrate transport into continuous substrate transport comprises the substrate transfer chamber configured to change a noncontinuous movement speed of substrates transported within the chamber into a continuous movement speed;
a first high-vacuum pump of gas-transfer type for evacuating the first dehydration chamber;
a second high-vacuum pump of gas-binding type for evacuating the second dehydration chamber, wherein the second high-vacuum pump comprises a gas-binding surface that is located within the second dehydration chamber,
wherein the first dehydration chamber is, with respect to the substrate transport, arranged between the second dehydration chamber and the substrate transfer chamber; and
a shield arranged within in the second dehydration chamber between the gas-binding surface and a substrate transport region of the second dehydration chamber.