| CPC H01L 21/67028 (2013.01) [B08B 3/04 (2013.01); H01L 21/67126 (2013.01)] | 13 Claims |
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1. A supercritical processing apparatus for processing a substrate using a supercritical fluid, comprising:
a vessel comprised of an upper vessel including a first fluid hole formed in a center thereof, and a lower vessel including a second fluid hole formed in a center thereof, wherein the supercritical fluid flows via the first fluid hole and the second fluid hole; and
a space defined between a lower surface of the upper vessel and an upper surface of lower vessel and configured to allow the substrate to be placed therein,
wherein the upper vessel further includes a first guide portion provided at a lower portion thereof to be gradually inclined downward toward a periphery thereof from the first fluid hole,
wherein the supercritical fluid flows along the first guide portion,
wherein the lower surface of the upper vessel includes a first lower horizontal surface, a second lower horizontal surface, and a vertical side surface connecting the first horizontal lower surface to the second lower horizontal surface, wherein the second lower horizontal surface of the upper vessel is lower than the first lower horizontal surface of the upper vessel,
wherein a portion of an interior surface of the upper and lower vessels that are engaged with each other is an uppermost upper horizontal surface of the lower vessel and is lower than the second lower horizontal surface of the upper vessel, and
wherein the first lower horizontal surface, the second lower horizontal surface and the vertical side surface connected with other to form a first stepped portion of the upper vessel, and
wherein when viewed in a plan view, the vertical side surface is located outside of a periphery of the substrate.
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