US 11,887,802 B2
Electron emitting element and method for manufacturing same
Katsuhisa Murakami, Tsukuba (JP); and Masayoshi Nagao, Tsukuba (JP)
Assigned to NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Appl. No. 17/912,659
Filed by NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo (JP)
PCT Filed Mar. 16, 2021, PCT No. PCT/JP2021/010617
§ 371(c)(1), (2) Date Sep. 19, 2022,
PCT Pub. No. WO2021/193237, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 2020-051288 (JP), filed on Mar. 23, 2020.
Prior Publication US 2023/0134647 A1, May 4, 2023
Int. Cl. H01J 1/312 (2006.01); H01J 1/90 (2006.01); C23C 16/34 (2006.01); H01J 9/02 (2006.01)
CPC H01J 1/312 (2013.01) [C23C 16/342 (2013.01); H01J 1/90 (2013.01); H01J 9/027 (2013.01); H01J 2209/012 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An electron emitting element comprising:
a laminated structure in which a first electrode, an electron accelerating layer made of an insulation film, a second electrode, and a cover film are laminated in that order, wherein
the second electrode is an electrode which transmits electrons and emits electrons from a surface thereof, and
the cover film is a film which transmits electrons, is a protective film made of a material different from that of the second electrode, and constitutes an electron emission surface thereof,
wherein the cover film is made of hexagonal boron nitride.