US 11,885,990 B2
UV reflective mirrors for display fabrication
Ki-Sung Song, Mayfield Heights, OH (US); Hunho Lee, Mayfield Heights, OH (US); Edgar E. Vidal, Mayfield Heights, OH (US); Kyung H. Chung, Mayfield Heights, OH (US); and Jason R. Clune, Mayfield Heights, OH (US)
Assigned to Materion Corporation, Mayfield Heights, OH (US)
Appl. No. 17/272,112
Filed by MATERION CORPORATION, Mayfield Heights, OH (US)
PCT Filed Aug. 23, 2019, PCT No. PCT/US2019/047871
§ 371(c)(1), (2) Date Feb. 26, 2021,
PCT Pub. No. WO2020/046739, PCT Pub. Date Mar. 5, 2020.
Claims priority of provisional application 62/738,210, filed on Sep. 28, 2018.
Claims priority of provisional application 62/723,102, filed on Aug. 27, 2018.
Prior Publication US 2021/0318472 A1, Oct. 14, 2021
Int. Cl. G02B 5/08 (2006.01); C22C 25/00 (2006.01)
CPC G02B 5/0891 (2013.01) [C22C 25/00 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an ultraviolet laser; and
at least one reflective mirror adapted to reflect a laser beam generated from the ultraviolet laser;
wherein the at least one reflective mirror comprises a mirror substrate,
wherein the mirror substrate is made from silicon carbide or an aluminum metal matrix composite, and has:
(i) an optical Figure of Merit (FoM) resonant frequency value of at least 6 relative to a fused-quartz substrate;
(ii) an optical FoM self-weight deflection value of less than 0.030 relative to a fused-quartz substrate;
(iii) an optical FoM steady-state thermal distortion coefficient value of less than 0.350 relative to a fused-quartz substrate; and
(iv) an optical FoM transient thermal distortion coefficient value of less than 0.600 relative to a fused-quartz substrate.