US 11,885,855 B2
Magnetic field measuring apparatus
Shigeki Okatake, Tokyo (JP); Yoshitaka Moriyasu, Tokyo (JP); Masanori Masuda, Tokyo (JP); and Takenobu Nakamura, Tokyo (JP)
Assigned to Asahi Kasei Microdevices Corporation, Tokyo (JP)
Filed by Asahi Kasei Microdevices Corporation, Tokyo (JP)
Filed on May 25, 2021, as Appl. No. 17/329,207.
Application 17/329,207 is a continuation of application No. PCT/JP2019/050826, filed on Dec. 25, 2019.
Claims priority of application No. 2018-243253 (JP), filed on Dec. 26, 2018.
Prior Publication US 2021/0286023 A1, Sep. 16, 2021
Int. Cl. G01R 33/00 (2006.01); G01R 33/09 (2006.01)
CPC G01R 33/0094 (2013.01) [G01R 33/0011 (2013.01); G01R 33/093 (2013.01); G01R 33/098 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A magnetic field measuring apparatus, comprising:
one or more processors supplied with computer readable instructions stored on one or more non-transitory, computer-readable storage media such that execution of the computer-readable instructions by the one or more processors provides a measurement data acquiring section and a measurement data computing section; and
a magnetic sensor array including a plurality of magnetic sensor cells, which is configured to detect an input magnetic field, which includes a to-be-measured magnetic field, in three axial directions at a plurality of locations in three-dimensional space, wherein each of the plurality of magnetic sensor cells comprises one or more magnetic sensors and one or more output sections each corresponding to a corresponding one of the one or more magnetic sensors, each of the one or more output sections being configured to output a corresponding output signal corresponding to the corresponding one of the one or more magnetic sensors, wherein the corresponding output signal of each of the one or more output sections is based on a corresponding input magnetic field including a corresponding to-be-measured magnetic field that correspond to the corresponding one of the one or more magnetic sensors,
wherein the measurement data acquiring section for acquiring is configured to acquire measurement data based on the corresponding output signal from each of the one or more output sections, and
wherein the measurement data computing section for calibrating is configured to calibrate the measurement data acquired by the measurement data acquiring section to provide calibrated measurement data that provide a measure of at least one of the input magnetic field and the to-be-measured magnetic field at the plurality of locations in three-dimensional space, and wherein
the measurement data computing section comprises:
an indicator calculation section for calculating an indicator illustrating calibration accuracy of the measurement data computing section; and
a failure determination section for determining a failure based at least in part on the indicator calculated by the indicator calculation section; wherein the failure determination section generates an alert to alert a user if the failure determination section determines that a failure has occurred.