US 11,885,697 B2
Multi strain gauges sensor for improved performance
Tsvi Shmilovich, Pardes Hanna-Karkur (IL); and Nicola Molinazzi, Kfar Sava (IL)
Assigned to EZMEMS LTD., Caesarea (IL)
Appl. No. 17/415,476
Filed by EZMEMS LTD., Caesarea (IL)
PCT Filed Dec. 19, 2019, PCT No. PCT/IL2019/051393
§ 371(c)(1), (2) Date Jun. 17, 2021,
PCT Pub. No. WO2020/129069, PCT Pub. Date Jun. 25, 2020.
Claims priority of provisional application 62/782,538, filed on Dec. 20, 2018.
Prior Publication US 2022/0065716 A1, Mar. 3, 2022
Int. Cl. G01L 1/22 (2006.01); G01B 7/16 (2006.01); H10N 30/30 (2023.01); H10N 30/80 (2023.01)
CPC G01L 1/2293 (2013.01) [G01B 7/18 (2013.01); G01L 1/2262 (2013.01); H10N 30/302 (2023.02); H10N 30/802 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A sensor device comprising:
a deformable substrate;
a plurality of sensing elements formed on or in first and second sides of said deformable substrate, each of said plurality of sensing elements comprises at least one of the following: (i) a plurality of strain sensitive lines radially extending with respect to a center of the sensor device; and (ii) a plurality of strain sensitive lines extending along a circular section with respect to the center of the sensor device; and
one or more electrically conducting vias formed in said deformable substrate for electrically connecting between one or more of the sensing elements formed on said first side of said deformable substrate and one or more of the sensing elements formed on said second side of said deformable substrate.