CPC G01L 1/2293 (2013.01) [G01B 7/18 (2013.01); G01L 1/2262 (2013.01); H10N 30/302 (2023.02); H10N 30/802 (2023.02)] | 20 Claims |
1. A sensor device comprising:
a deformable substrate;
a plurality of sensing elements formed on or in first and second sides of said deformable substrate, each of said plurality of sensing elements comprises at least one of the following: (i) a plurality of strain sensitive lines radially extending with respect to a center of the sensor device; and (ii) a plurality of strain sensitive lines extending along a circular section with respect to the center of the sensor device; and
one or more electrically conducting vias formed in said deformable substrate for electrically connecting between one or more of the sensing elements formed on said first side of said deformable substrate and one or more of the sensing elements formed on said second side of said deformable substrate.
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