US 11,885,682 B2
System, apparatus, and method for spectral filtering
Chris D. Pylant, Carrollton, TX (US); Timothy C. Michals, Carrollton, TX (US); and John D. Corless, Carrollton, TX (US)
Assigned to Verity Instruments, Inc., Carrollton, TX (US)
Appl. No. 17/915,936
Filed by Verity Instruments, Inc., Carrollton, TX (US)
PCT Filed Apr. 13, 2022, PCT No. PCT/US2022/024679
§ 371(c)(1), (2) Date Sep. 29, 2022,
PCT Pub. No. WO2022/221446, PCT Pub. Date Oct. 20, 2022.
Claims priority of provisional application 63/174,126, filed on Apr. 13, 2021.
Prior Publication US 2023/0194342 A1, Jun. 22, 2023
Int. Cl. G01J 3/02 (2006.01); G01J 3/28 (2006.01); H01L 21/66 (2006.01)
CPC G01J 3/0275 (2013.01) [G01J 2003/2826 (2013.01); H01L 22/10 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method of processing spectral data, comprising:
receiving temporally separated spectral data samples; and
identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples, wherein the identifying includes comparing a width count of spectral data at elements of the temporally separated spectral data samples to a width count limit corresponding to a number of counts and comparing a difference to an intensity threshold value, wherein the difference is between elements of the intermediate one of the temporally separated spectral data sample and a mean of corresponding elements of the at least one preceding and at least one subsequent ones of the spectral data samples.