CPC G01C 25/005 (2013.01) [G01C 19/5783 (2013.01)] | 9 Claims |
1. An elastically supported electrode substrate for detecting an unbalanced mass of a resonant gyroscope, comprising:
an outer frame and an inner structure,
a connection part connected to an anchor of a resonator of the resonant gyroscope arranged at a center of the inner structure, and
electrodes distributed on the inner structure;
wherein the inner structure is connected inside the outer frame through elastic beams, the inner structure has a resonant stroke of a torsional pendulum and/or a translational movement inside the outer frame, and a difference between a resonant frequency of a mode of the inner structure in the elastically supported electrode substrate and a resonant frequency of an operating mode of the resonator is smaller than a bandwidth of the mode of the elastically supported electrode substrate.
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