US 11,885,618 B2
Three-axis micromachined gyroscope
Zhao Ma, Shenzhen (CN); Zhan Zhan, Shenzhen (CN); Shan Yang, Shenzhen (CN); Xiao Kan, Shenzhen (CN); Yang Li, Shenzhen (CN); Veronica Tan, Singapore (SG); Yan Hong, Shenzhen (CN); and Kahkeen Lai, Singapore (SG)
Assigned to AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD, Wuhan (CN)
Filed by AAC Kaitai Technologies (Wuhan) CO., LTD, Hubei (CN)
Filed on Dec. 31, 2021, as Appl. No. 17/566,706.
Claims priority of application No. 202110362578.1 (CN), filed on Apr. 2, 2021.
Prior Publication US 2022/0316882 A1, Oct. 6, 2022
Int. Cl. G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) 10 Claims
OG exemplary drawing
 
1. A three-axis micromachined gyroscope, comprising:
a base;
a vibration part suspended by the base, comprising a vibration assembly for receiving Coriolis force and generating a position change, the vibration assembly comprising four weights symmetrically distributed and connected to each other for swing in a plane parallel to the base driven by the drive electrode;
a drive electrode for driving the vibration part;
a detection part connected with the vibration part for detecting position change of the weights after receiving Coriolis force, and converting the position change of the weight into an electrical signal for outputting; and
a swing center of each weight being outside the corresponding weight; wherein
the four weights include a first weight, a second weight, a third weight, and a fourth weight; when the gyroscope is stationary,
the first weight and the third weight are symmetrical with respect to a first axis;
the second weight and the fourth weight are symmetrical with respect to the first axis;
the first weight and the second weight are symmetrical with respect to a second axis perpendicular to the first axis; and
the third weight and the fourth weight are symmetrical with respect to the second axis;
when the three-axis micromachined gyroscope receives an angular velocity, the swinging weight is subjected to Coriolis force and a corresponding position change occurs.