US 11,885,611 B2
Detection device, processing device, equipment, detection method, and detection program
Yoshihiro Nakagawa, Tokyo (JP); and Taro Matsuo, Tokyo (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Filed by NIKON CORPORATION, Tokyo (JP)
Filed on Feb. 2, 2023, as Appl. No. 18/104,991.
Application 18/104,991 is a continuation of application No. 16/889,668, filed on Jun. 1, 2020, granted, now 11,593,956.
Application 16/889,668 is a continuation of application No. PCT/JP2018/042102, filed on Nov. 14, 2018.
Claims priority of application No. 2017-231128 (JP), filed on Nov. 30, 2017.
Prior Publication US 2023/0194246 A1, Jun. 22, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01B 11/245 (2006.01); G06T 7/50 (2017.01); G01B 11/22 (2006.01); G01B 11/24 (2006.01); G06V 10/143 (2022.01); G06V 40/20 (2022.01)
CPC G01B 11/245 (2013.01) [G01B 11/22 (2013.01); G01B 11/24 (2013.01); G06T 7/50 (2017.01); G06V 10/143 (2022.01); G06V 40/23 (2022.01); G06T 2207/10028 (2013.01); G06T 2207/10048 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A processing device comprising:
an obtainer that obtains first distance information that is detected information of a distance to a target object;
a first generator that generates first shape information that indicates a shape of the target object based on the first distance information;
a memory storage that stores additional shape information that indicates an additional shape to be added at a relative position preliminarily set with respect to a portion of the shape of the target object; and
a second generator that generates combined shape information in which the additional shape is added to the shape of the target object at the relative position; wherein
the additional shape information is generated based on information that is different from the first distance information.