US 11,885,610 B2
Method and system for measuring coating thickness
Ian Stephen Gregory, Cambridge (GB); Robert May, Cambridge (GB); and Daniel James Farrell, Cambridge (GB)
Assigned to TeraView Limited, Cambridge (GB)
Filed by TeraView Limited, Cambridge (GB)
Filed on Jun. 21, 2021, as Appl. No. 17/352,766.
Application 17/352,766 is a continuation of application No. 16/480,186, granted, now 11,085,755, previously published as PCT/GB2018/050242, filed on Jan. 26, 2018.
Claims priority of application No. 1701405 (GB), filed on Jan. 27, 2017.
Prior Publication US 2021/0310796 A1, Oct. 7, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. G01B 11/06 (2006.01); G01N 21/3581 (2014.01); G01N 33/32 (2006.01)
CPC G01B 11/0625 (2013.01) [G01N 21/3581 (2013.01); G01N 33/32 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A sensor for a THz measurement system, the sensor comprising:
a pulsed source of THz radiation adapted to irradiate a sample with a pulse of THz radiation, said pulse comprising a plurality of frequencies in the range from 0.01 THz to 10 THz;
a detector for detecting reflected radiation from the sample, wherein the sensor is configured to determine sensor position information from the radiation reflected from the sample;
a non-THz measurement gauge adapted to measure the position from the sensor to the sample; and
an indicator adapted to indicate when the measurement gauge and the determined sensor position information indicates that the sensor is at a suitable distance for the sensor to make a THz measurement of the sample.