US 11,885,321 B2
Cryopump, cryopump system, and method for starting operation of cryopump
Takahiro Yatsu, Tokyo (JP); and Toshiyuki Kimura, Tokyo (JP)
Assigned to SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed by SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed on Apr. 27, 2022, as Appl. No. 17/730,496.
Application 17/730,496 is a continuation of application No. PCT/JP2020/039093, filed on Oct. 16, 2020.
Claims priority of application No. 2019-196122 (JP), filed on Oct. 29, 2019.
Prior Publication US 2022/0397108 A1, Dec. 15, 2022
Int. Cl. F04B 37/08 (2006.01); F04B 25/00 (2006.01)
CPC F04B 37/085 (2013.01) [F04B 25/00 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A cryopump comprising:
a cryopump housing;
a cryopanel disposed in the cryopump housing and provided with a non-combustible adsorbent;
a heater that heats the non-combustible adsorbent and the cryopanel;
a purge valve that is mounted to the cryopump housing and connects the cryopump housing to a purge gas source;
a rough valve that is mounted to the cryopump housing and connects the cryopump housing to a rough pump;
a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing; and
a controller that receives a regeneration start command and controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either (i) a sublimation regeneration sequence or (ii) a dehydration sequence,
the sublimation regeneration sequence configured to sublimate water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere,
the dehydration sequence configured to dehydrate the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere having a higher pressure than the vacuum atmosphere, at room temperature or a temperature higher than the room temperature,
wherein the sensor includes a temperature sensor that generates a temperature measurement signal indicating a temperature of the non-combustible absorbent, and
the controller is configured to control at least one of the heater, the purge valve, and the rough valve to execute the dehydration sequence in a case where the non-combustible absorbent is at the room temperature, based on the temperature measurement signal.