US 11,885,021 B2
Gas supply member with baffle
Kartik Shah, Saratoga, CA (US); Vishwas Kumar Pandey, Madhya Pradesh (IN); Kailash Pradhan, Campbell, CA (US); Sairaju Tallavarjula, Santa Clara, CA (US); Rene George, San Carlos, CA (US); Eric Kihara Shono, San Mateo, CA (US); Philip A. Bottini, Santa Clara, CA (US); and Roger Curtis, Stockton, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 11, 2021, as Appl. No. 17/317,418.
Application 17/317,418 is a division of application No. 16/049,239, filed on Jul. 30, 2018, granted, now 11,124,878.
Claims priority of application No. 201741027099 (IN), filed on Jul. 31, 2017.
Prior Publication US 2021/0262093 A1, Aug. 26, 2021
Int. Cl. C23C 16/455 (2006.01); H01L 21/67 (2006.01); C23C 14/56 (2006.01); C23C 16/44 (2006.01)
CPC C23C 16/45591 (2013.01) [C23C 14/564 (2013.01); C23C 14/566 (2013.01); C23C 16/4401 (2013.01); C23C 16/45563 (2013.01); H01L 21/67126 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A gas supply member comprising:
a first side;
a second side opposite the first side;
an inner surface defining a first opening, the first opening extending between the first side and the second side;
a third side orthogonal to the first side, the third side comprising:
a first extension having a face partially defining the second side and comprising a first plurality of holes extending through the first extension to the face;
a fourth side opposite the third side, the fourth side comprising:
a protrusion, the protrusion having a face partially defining the second side; and
a baffle disposed adjacent to the inner surface, the baffle comprising:
a first portion extending from the inner surface;
a second portion attached to the first portion, the second portion orthogonal to the first portion and parallel to the third side; and
a cavity formed between the first portion and the second side
a second plurality of holes formed in the third side, wherein the second plurality of holes is in fluid communication with the baffle.