US 11,885,017 B2
Vaporizer and method for manufacture thereof
Yutaka Suzuki, Niigata (JP); and Takashi Saito, Niigata (JP)
Assigned to WELCON INC.
Appl. No. 17/602,801
Filed by WELCON INC., Niigata (JP)
PCT Filed Apr. 17, 2019, PCT No. PCT/JP2019/016527
§ 371(c)(1), (2) Date Oct. 11, 2021,
PCT Pub. No. WO2020/213104, PCT Pub. Date Oct. 22, 2020.
Prior Publication US 2022/0154333 A1, May 19, 2022
Int. Cl. C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/06 (2006.01); C23C 16/448 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/455 (2013.01) [C23C 16/06 (2013.01); C23C 16/4481 (2013.01); C23C 16/4486 (2013.01); C23C 16/52 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A vaporizer for obtaining a gaseous material for film formation by vaporizing a mist of material through heating,
the vaporizer comprising inside a main part made of a metallic material: first flow paths through which the mist of material flows and second flow paths through which a heat medium for heating the mist of material flows;
the first flow paths having a cross-sectional diameter in terms of equal area circle equivalent diameter of 5 mm or less, and the second flow paths having a cross-sectional diameter in terms of equal area circle equivalent diameter of 2 mm or less; and
voids other than the second flow paths do not exist inside the main part between one first flow path and other first flow paths present next thereto.