| CPC C01B 32/182 (2017.08) [H01L 29/1606 (2013.01); H01L 29/7606 (2013.01); C01B 2204/04 (2013.01); C01B 2204/22 (2013.01)] | 20 Claims |
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1. A multilayer body comprising:
a base portion including silicon carbide and having a first major surface; and
a graphene film disposed on the first major surface and having an exposed surface, the exposed surface being a major surface located on a side opposite to a side on which the base portion is located, wherein
in an ion mass distribution versus depth of the multilayer body determined by time-of-flight secondary ion mass spectrometry that uses bismuth ions as primary ions and uses cesium ions as sputtering ions,
detection intensities of C6 ions have a maximum value at a depth of greater than 0 nm and 2.5 nm or less from the exposed surface,
detection intensities of C3 ions have a maximum value at a depth of greater than 0 nm and 3.0 nm or less from the exposed surface,
detection intensities of SiC4 ions have a maximum value at a depth of 0.5 nm or greater and 5.0 nm or less from the exposed surface,
detection intensities of SiC ions have a maximum value at a depth of 0.5 nm or greater and 10.0 nm or less from the exposed surface,
detection intensities of Si2 ions have a maximum value at a depth of 0.5 nm or greater and 10.0 nm or less from the exposed surface, and
a value obtained by dividing the maximum value of the detection intensities of SiC4 ions by an average of detection intensities of SiC4 ions associated with a region of the multilayer body is 1 or greater and 3.5 or less, the region having distances from the exposed surface in a thickness direction of the multilayer body of equal to or greater than 8 nm and 12 nm or less.
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