CPC B81B 7/0077 (2013.01) [B81C 1/00269 (2013.01); H10N 30/02 (2023.02); H10N 30/88 (2023.02); B81B 2203/0315 (2013.01); B81C 2203/0109 (2013.01); B81C 2203/032 (2013.01)] | 15 Claims |
1. A cavity structure, comprising:
a component support;
a component extending from and suspended by the component support; and
a structure tether extending from the component support;
a cavity substrate comprising a substrate surface and wherein the component support is disposed on the substrate surface;
a destination substrate; and
a broken or separated structure tether physically connected to the cavity substrate,
wherein the cavity substrate is disposed on the destination substrate.
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