US 11,884,076 B2
Fluid management system for inkjet machines
Daihua Zhang, Los Altos, CA (US); Kazuya Daito, Milpitas, CA (US); Kang Luo, Santa Clara, CA (US); Elsa Massonneau, Sunnyvale, CA (US); Alexey Stepanov, Sunnyvale, CA (US); and Ludovic Godet, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 12, 2022, as Appl. No. 17/647,791.
Claims priority of provisional application 63/186,321, filed on May 10, 2021.
Prior Publication US 2022/0355589 A1, Nov. 10, 2022
Int. Cl. B41J 2/165 (2006.01); B41J 2/18 (2006.01)
CPC B41J 2/16552 (2013.01) [B41J 2/18 (2013.01); B41J 2002/16594 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A fluid management system, comprising:
a waste tank disposed in a lower region of an inkjet chamber;
a servicing fluid supply tank disposed in the lower region;
a inkjet material supply tank disposed in the lower region;
an inkjet printer disposed in a processing region of the inkjet chamber, the inkjet printer comprising:
a processing apparatus; and
an inkjet service station;
a servicing fluid supply line fluidly coupled between the servicing fluid supply tank and the inkjet service station of the inkjet printer;
a servicing fluid return line fluidly coupled between the inkjet service station of the inkjet printer and the waste tank;
a servicing fluid recirculation line fluidly coupled to the waste tank and the servicing fluid supply tank;
an ink supply line fluidly coupled between the inkjet material supply tank and the processing apparatus of the inkjet printer;
an ink return line fluidly coupled between the processing apparatus of the inkjet printer and the waste tank; and
an ink recirculation line fluidly coupled to the waste tank and the inkjet material supply tank.