US 11,883,859 B2
Laser cleaning method and device for improving uniformity of laser cleaning surface
Xuechun Lin, Beijing (CN); Zhiyan Zhang, Beijing (CN); Haijun Yu, Beijing (CN); Houwang Zhu, Changsha (CN); Quansheng Zeng, Changsha (CN); Zhiyong Dong, Beijing (CN); Hao Liang, Beijing (CN); Wenhao Ma, Beijing (CN); and Hongyang Wang, Beijing (CN)
Assigned to INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES, Beijing (CN)
Filed by INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES, Beijing (CN); and CHANGSHA AERONAUTICAL VOCATIONAL AND TECHNICAL COLLEGE, Changsha (CN)
Filed on Dec. 22, 2020, as Appl. No. 17/130,486.
Claims priority of application No. 201911353814.2 (CN), filed on Dec. 24, 2019.
Prior Publication US 2021/0187565 A1, Jun. 24, 2021
Int. Cl. B23K 26/082 (2014.01); B08B 7/00 (2006.01); B23K 26/073 (2006.01); B23K 26/06 (2014.01)
CPC B08B 7/0042 (2013.01) [B23K 26/06 (2013.01); B23K 26/073 (2013.01); B23K 26/082 (2015.10)] 4 Claims
OG exemplary drawing
 
1. A laser cleaning device for improving uniformity of a laser cleaning surface, wherein the laser cleaning device comprises:
a laser configured to emit a laser beam;
a galvanometer configured to shape the laser beam linearly by swing; and
a motor configured to receive a periodical signal and control reciprocated swing of the galvanometer based on the periodical signal,
wherein the periodical signal is a peaked-top sine wave signal, and the laser beam shaped by the galvanometer is used for laser cleaning;
wherein the laser cleaning device further comprises a signal generation module configured to generate the peaked-top sine wave signal and transmit the peaked-top sine wave signal to the motor;
wherein the signal generation module comprises: a first signal generator configured to generate a sine wave signal; a second signal generator configured to generate a triangular wave signal; and a signal converting circuit configured to combine and convert the sine wave signal and the triangular wave signal to obtain the peaked-top sine wave signal;
wherein the signal converting circuit comprises:
a first amplitude limiting circuit configured to receive the sine wave signal to generate a flat-top sine signal;
a second amplitude limiting circuit configured to receive the triangular wave signal to generate a flat-top triangular wave signal;
a subtraction circuit configured to subtract the flat-top triangular wave signal from the triangular wave signal to obtain a special triangular wave signal, such that the special triangular wave signal has a same period as the triangular wave signal and in the period of the special triangular wave, the special triangular wave comprises a first part, a second part, a third part, a fourth part and a fifth part which are connected in sequence, wherein each of the first part, the third part, and the fifth part is at zero voltage, the second part is a positive triangular pulse, and the fourth part is a negative triangular pulse spaced apart from the first part by the third part; and
an addition circuit configured to add the flat-top sine signal with the special triangular wave signal to obtain the peaked-top sine wave signal, such that in a period of the peaked-top sine wave signal, the peaked-top sine wave signal has first top portion in form of a positive triangular wave and a second top portion in form of a negative triangular wave.