CPC B06B 1/0292 (2013.01) [B81B 3/001 (2013.01); B81C 1/00984 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0392 (2013.01); B81C 2201/0109 (2013.01); B81C 2201/0125 (2013.01); B81C 2201/0176 (2013.01)] | 20 Claims |
1. A method of forming an ultrasonic transducer device, the method comprising:
depositing a first layer on a substrate;
depositing a second layer on the first layer;
patterning the second layer at a region corresponding to a location of a transducer cavity;
depositing a third layer that refills regions created by patterning the second layer;
planarizing the third layer to a top surface of the second layer;
removing the second layer;
conformally depositing a fourth layer over the first layer and the third layer;
defining the transducer cavity in a support layer formed over the fourth layer; and
bonding a membrane to the support layer.
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